A thermal bimorph actuator is designed and simulated for large displacement. silicon and titanium are used as the bimetal, whereas in the bimorph structure heater is sandwiched between the metals. so, aluminum is used as the heater. the large difference in coefficient of thermal expansion (cte) of silicon and titanium can generate the deflection with small rise in temperature. large displacement of 0.2 mm is obtained in thermal actuator, which is higher when compared to conventional micro actuators used in mems (micro-electro mechanical systems). this actuator can find many applications where a large vertical displacement is needed. the proposed actuator can be used as zooming lens in mobiles and camcorders, it can also replace the switches and relays.
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